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DCS多層分級控制系統

DCS的基本設計思想是采用控制分散、操作和管理集中的思路，實現多層分級控制和合作的結構。目前，主要應用在冶金、電力和石化等領域。

DCS 是實現多層分級控制的系統，在使用的過程中具有兩個基本的分級環節：現場控制單元和操作站。

DCS基本分級環節

● 現場控制單元：

指遠離控制中心而在現場附近使用的控制系統，可根據DCS本身機構實現對現場的監控和控制。現場控制單元的使用需要準備不同的設備，如配置插件，即根據系統的要求配置相應的中央處理器插件、電源插件和通信插件等，為后期的分級控制奠定基礎；

冗余配置是分級控制系統中重要的環節之一，在配置的過程中要對主機插件、電源插件和通信插件等實現冗余配置；實現隨現場的分級控制和監測需要對不同的硬件添加DCS，確保分級控制的可靠性。

● 操作站：

操作站中記錄并顯示控制系統中的不同數據，是展示人機交互的場所，常用的操作站中包括系主機控制、顯示設備和鍵盤輸入設備等，是主要使用人工操作記錄和反饋的場所，主要實現顯示不同數據、報警和操作等多種重要功能。

Applied Materials Process Kit S3V UNI92

Applied Materials Process Kit TR Open

Applied Materials Sputter Process Kit

AE RFDS 2000-2VGENERATO?R 3155038 2000W, 13.56MHz

AMAT CVD MATCH 3000V, 13.56MHz 0010-09750W

AMAT ETCH MATCH 3000V, 13.56MHz 0010-09490W

AMAT LF5 GENERATOR 752 057 2050 500W, 50-460KHz

ASTEX ATL-100RA MATCH ATL100RA 500W, 350KHz

ENI / MKS OEM12B GENERATOR OEM12B-07 0190-76048

LAM RESEARCH MINI MATCH 13.56MHz 853-015130-503-?C-262C

TRAZAR TRAZAR MATCH AMU2-1 4400V, 13.56MHz

VARIAN E500 MAIN POWER SOURCE CABINET E11033350

VARIAN E500 SCAN GEN CONTROL E11005430

VARIAN E500 PNEU ASSY,CHASSIS SOURCE CAB E11033360

VARIAN E500 TERMINAL PNUMATICS MODULE E11064970

VARIAN E500 PS Control PCB D-E15002350

VARIAN E500 TCR POWER SUPPLY E11000140

AMAT P5000 CHAMBER INTERCONNECT BOARD ASSY 0100-09099

AMAT P5000 WAFER LIFT PRECISION 5000 0010-09341

AMAT P5000 WAFER LIFT CERAMIC HOOP 0010-10033

AMAT P5000 TURBOTRONIK NT340M/I

AMAT P5000 TURBO PUMP TURBOVAC 340MC

AMAT P5000 TEOS INTERLOCK BOARD 0100-09175 REV.C

AMAT P5000 TEOS INTERFACE BOARD 0100-09174

AMAT P5000 TEOS GAS INTERFACE BOARD 0100-09107

AMAT P5000 SUSCEPTOR LIFT ASSY 0010-09340

AMAT P5000 RS232 VIDEO INTERCONNECT BOARD 0100-09145

AMAT P5000 ROBOT DRIVE 8 INCH 0010-13321R

AMAT P5000 PNUEMATIC CONTROL BOARD 0100-09008

AMAT P5000 P-CHUCK LIFT PRECISION 5000 0010-30029

AMAT P5000 LIQUID SOURCE HEATER CONTROL BOARD 0100-0918

AMAT P5000 LAMP MODULE ASSY PLATED 200MM 0010-09978

AMAT P5000 GAS PANEL BOARD 0100-76258

NOVELLUS C2 ALTUS TYLAN GENERAL ADAPTORR AC2 27-053667-

NOVELLUS C2 ALTUS RIGHT LOADLOCK INTFC PCB 03-034720-00

NOVELLUS C2 ALTUS DIGITAL DYNAMICS IO CONT 27-10157-00

NOVELLUS C2 ALTUS DIAGNOSTIC HUB CT-N806 CORMAN TECH.

LAM 4500 WAFER HANDLER 715-130080-008

LAM 4500 GAP MOTOR CONTROLLER BOARD 810-17018

LAM 4500 FORCE COMPUTERS PCB 810-017034-300

LAM 4500 ASSY GAP DRIVE PROTECTOR 853-011168

LAM 4500 16 CHANNEL HEAT/COOL BOARD 810-17082

VARIAN E SERIES PCB ASSY DIGITAL IO E15000031

VARIAN E SERIES ORIENTIER CONTROLLER E11001411

VARIAN E SERIES LINEAR MOTOR SERVO CONTROLLER E11001062

VARIAN E SERIES INTERFACE 101927002

VARIAN E SERIES DRIVE,ELEVATOR,?ASSY E11035771

VARIAN E SERIES ARM SERVO CONTROLLER E11001000

AMAT P5000 CASSETTE HANDLER 0010-76739 & 0010-13104

LAM 4500 HARMONIC ARM DRIVE ASSEMBLY 853-012123-001

LAM 4500 FORCE COMPUTERS PCB 810-017038-002

LAM 4500 FORCE COMPUTERS PCB 810-017035-001

LAM 4500 ASSEMBLY HARD DRIVE W/ CONT. 853-190023-001

LAM 4500 SPINNER ASSY 853-012525-001

LAM 4500 PCB 810-017075-003

LAM 4500 Outer Gate Assy 853-012350-002

LAM 4500 Etcher Inner Gate Valve Drive 853-012200-002

LAM 4500 POWER SUPPLY,+5 +\-15VDC,PS2 660-091821-001

LAM 4500 MONITOR ASSY 852-017500-003

LAM 4500 GAP DRIVE AMP INTERLOCK BOARD 810-17013

LAM 4500 ASSY DIP HIGH FREQUENCY 810-017003-004

LAM 4500 PCB HEARTBEAT 810-17012-002

LAM 4500 ASSY EDGE SENSOR 853-012500-002

LAM 4500 WELDMENT 839-011237-001

AMAT XR80 CONTACTER DRIVE 0100-90385

AMAT XR80 CHASSIS ASSY 0090-91657ITL

AMAT XR80 CHASSIS ASSY 0090-91251ITL

AMAT XR80 CHASSIS ASSY 0090-91621ITL

AMAT XR80 80Kv PRE ACCELERATION CONVERTER 0090-91131

AMAT XR80 HV POWER SUPPLY 0090-91130

AMAT XR80 DATA ACQUISITION INVERTER 0100-90027

AMAT XR80 TPDU MONITOR 0100-90492

AMAT XR80 GAP SERVO 0100-91055

NIKON i14,EX14,S202 Reticle Blinds unit 4B991-003AN

NIKON i14,EX14,S202 Sub Alignment Controller 4S990-546

NIKON i14,EX14,S202 PZT Driver 4S586-274

NIKON i14,EX14,S202 Load/Unload Slider Assembly 4B019-9

NIKON Z Theta Scale Unit For (S202+) Voice Coil 4S081-

NIKON i14,EX14,S202 Accelerometer Controller 4S585-505

NIKON i14,EX14,S202 X Linear Motor Stage A 4S061-688-2

NIKON i14,EX14,S202 Y Fine Stage Amp (S202) / Reticle S

NIKON i14,EX14,S202 Y Linear Motor Stage A 4S061-690-1

NIKON i14,EX14,S202 Wafer Loader robot 4K171-841-5AN

NIKON i14,EX14,S202 REX RL Full Assembly 4B020-355AN

NIKON i14,EX14,S202 WL3 Robot Controller 4S061-495-2A

NIKON i14,EX14,S202 RL Wait Table Unit 4B020-229AN

NIKON i14,EX14,S202 Piezo Drive Amp 4S991-306AN

NIKON Oscillation Mirror Unit 4L990-947

NIKON Z Theta 1, 2 & 3 4B991-099 / 4B991-100 / 4B991-1

NIKON i14,EX14,S202 HP5517C Interferometer Laser Head 4

NIKON i14,EX14,S202 Reticle Microscope Drive 4B990-963

NIKON i14,EX14,S202 Reticle Microscope Drive 4B990-964

VARIAN E1000 PCB SUB ASSY. DOSE CONTROLLER 112321003

VARIAN E1000 PCB ASSY LOAD LOCK INTERFACE D-E15000710

VARIAN E1000 307 VACUUM GUAGE CONTROLLER E23000035

VARIAN E1000 POWER BOX ASSY E11038270 REV 6

VARIAN E1000 EXHAUST CONDUCTIVITY MONITOR E11049810

NIKON FIA AF Sensor Unit (PCB 4S007-663) 4B990-840

NIKON i14,EX14,S202 FIA Lamp Power Supply 4B990-840

NIKON i14,EX14,S202 CX Carrier Unit 4B020-228AN

NIKON i14,EX14,S202 Pneumatic Control Box For Air Mount

NIKON VT284-CRT Terminal 4S598-039