40 30.3+0.2
3.1+0.1
31.5+0.2
Potentiometer without protective cover Potentiometer with protective cover Minimum distance
Version Order No.
A B
Potentiometer 1 W 25% tolerance, without protective cover
0 - 100 Ohm GHG 418 8131 R 0011
0 - 220 Ohm GHG 418 8131 R 0012
0 - 470 Ohm GHG 418 8131 R 0013
0 - 1000 Ohm GHG 418 8131 R 0014
0 - 2200 Ohm GHG 418 8131 R 0017
0 - 4700 Ohm GHG 418 8131 R 0015
0 - 10000 Ohm GHG 418 8131 R 0016
Ordering Code for Component
Example for Ordering Code
Accessories
Dimension
418 8131 Potentiometer
Product of Manufacture: CN
EATON’S CROUSE-HINDS BUSINESS F.72
Signal lamp
ATEX marking II 2 G Ex ed IIC/ II 2 G Ex d ia IIC
Application temperature -20?C ~ +40?C
-55?C ~ +55?C(option)
Rated voltage
(Ex ed IIC) 20V to 250V AC/DC
(Ex d ia IIC) 10V to 28V DC
(Ex ed IIC) 12V to 30V AC/DC
Rated current
(20V to 250V) approx. 4-15mA
(10V to 28V Ex d ia IIC) max. 25mA
(12V to 30V) max. 24mA
Connecting terminals 2x2.5mm2
Dimension (L x W x H) approx. 59 x 31 x 45 mm
Weight 0.15kg
Type of mounting ? 30.5 mm fixing hole
Enclosure colour grey
Technical Data
418 8170 Signal Lamp
Product of Manufacture: CN
F.73 EATON’S CROUSE-HINDS BUSINESS
77
57
38
21
5
126
57
10
65
40 30.3+0.2
3.1+0.1
31.5+0.2
Signal lamp
Code Component Code
A Signal lamp GHG 418 8170
Code Voltage Code
B 20 V - 250 V AC/DC 51
18 V - 30 V DC (Ex-i) 52
12 V - 30 V AC/DC 53
A B
GHG 418 8170 R00 __
Type OU Order No.
Protective cover to meet IP66 5 GHG410 1939 R0002
Please note that we can only deliver in the ordering units (OU) stated in the tables above.
Signal lamp without protective cover Signal lamp with protective cover
Minimum distances
Version Order No.
A B
Version without protective cover with lens cover yellow, red, green and white
Universal voltage 20V-250V AC/DC GHG4188170 R0051
For intrinsically safe circuits (18 V up to 30 V DC1) GHG4188170 R0052
Low voltage 12 V up to 24 V AC/DC GHG4188170 R0053
Ordering Code for Component
Example for Ordering Code
Accessories
Dimension
418 8170 Signal Lamp
Product of Manufacture: CN
EATON’S CROUSE-HINDS BUSINESS F.74
Moving iron Moving coil
ATEX marking II 2 G Ex e IIC / I M 2 Ex e I II 2 G Ex ib IIC / I M 2 Ex ib I
Application temperature -20?C ~ +40?C -20?C ~ +40?C
-55?C ~ +55?C (option) -55?C ~ +55?C (option)
Rated voltage up to 690V up to 690V
Power consumption max. 0.31 VA max. 0.31 VA
Overload range 10 fold - 25 sec. 10 fold - 5 sec.
25 fold - 4 sec.
50 fold - 1 sec.
indicated: 1:1.5
Measuring range max. 0-25 A direct/ n / 1A 0/4-24mA
Inductance Li <0.1mH
Capacitance Ci <0.1 nF
Winding specification of moving coil 26.5 windings
Internal resistance 2.5Ω+/- 30%
Open circuit voltage Ui 30V
Short circuit current li 150mA
Accuracy Class 2.5 Class 1.5
Connecting terminals 2x1.5-4mm2 2x1.5-4mm2
Degree of protection acc. to EN 60529 IP66 IP66
Cable glands/Gland plates/Enclosure drilling 1xM25(?8-17mm) 1xM25(?8-17mm)
Dimension (L x W x H) 160x95x62mm 160x95x62mm
Display size AM72 72x72mm 72x72mm
Weight 0.8kg 0.8kg
Type of mounting DIN rail mounting DIN rail mounting
Enclosure colour grey grey
Interchangeable scales Measuring instrument
Technical Data
AM 72 Measuring Instrument 413 84
Product of Manufacture: CN
F.75 EATON’S CROUSE-HINDS BUSINESS
Interchangeable scales
Code Component Code
A AM72 measuring instrument GHG 412 828
Code Movement Code
B Direct connection 1
Ct connection 1/A 2
Port 0 - 20/24 mA (scale 0-100% / 120%)1) 5
Port 4 - 20/24 mA (scale 0-100% / 120%)1) 6
Moving-coil connection 0 - 20/24 mA (scale 0-100% / 120%) 1) 3) 7
Moving-coil connection 4 - 20/24 mA (scale 0-100% / 120%) 1) 3) 8
Code Measuring range Code Measuring range Code
C 0 - 1 002 0 - 75 / 112.5 A 013
0 - 2.5 / 3.75 A 2) 003 0 - 100 / 150 A 014
0 - 5 / 7.5 A 2) 004 0 - 150 / 225 A 015
0 - 10 / 15 A 2) 005 0 - 200 / 300 A 016
0 - 15 / 22.5 A 2) 006 0 - 250 / 375 A 017
0 - 20 / 30 A 2) 008 0 - 300 / 450 A 018
0 - 30 / 45 A 009 0 - 400 / 600 A 019
0 - 40 / 60 A 010 0 - 500 / 750 A 020
0 - 50 / 75 A 011 0 - 600 / 900 A 021
0 - 60 / 90 A 012 0 - 100% / 150% 033 1) Movement 0 -20 mA / 4 - 20 mA and with moving-coil connection are only available with scale 0 - 100%/120%
2) Version for direct connection (standard: CT connection n/1A) possible
3) Moving coil only for Ex-i of Ex-d flameproof applications
Other interchangeable scales available on request
A B C
GHG 412 828 _ R0 __
Measuring instrument
Ordering Code for Component
AM 72 Measuring Instrument 413 84
EATON’S CROUSE-HINDS BUSINESS F.76
Measuring range Order No.
Measuring instrument AM72, direct measurement, version with 1 x cable entry M25
0 - 1 / 1.5 A GHG 412 8281 R0002
0 - 2.5 / 3.75 A GHG 412 8281 R0003
0 - 5 / 7.5 A GHG 412 8281 R0004
0 - 10 / 15 A GHG 412 8281 R0005
0 - 16 /24 A GHG 412 8281 R0007
0 - 20 / 24 mA 0-100% / 120% (Ri = 320Ω) GHG 412 8285 R0033
4 - 20 / 24 mA 0-100% / 120% (Ri = 320Ω) GHG 412 8286 R0035
Measuring instrument AM 72, Ct connection, n/1A, version with 1 x cable entry M25
0 - 1 / 1.5 A GHG 412 8282 R0002
0 - 2.5 / 3.75 A GHG 412 8282 R0003
0 - 5 / 7.5 A GHG 412 8282 R0004
0 - 10 / 15 A GHG 412 8282 R0005
0 - 15 / 22.5 A GHG 412 8282 R0006
0 - 20 / 30 A GHG 412 8282 R0008
0 - 30 / 45 A GHG 412 8282 R0009
0 - 40 / 60 A GHG 412 8282 R0010
0 - 50 / 75A GHG 412 8282 R0011
0 - 60 / 90 A GHG 412 8282 R0012
0 - 75 / 112.5 A GHG 412 8282 R0013
0 - 100 / 150 A GHG 412 8282 R0014
0 - 150 / 225 A GHG 412 8282 R0015
0 - 200 / 300 A GHG 412 8282 R0016
0 - 250 / 375 A GHG 412 8282 R0017
0 - 300 / 450 A GHG 412 8282 R0018
0 - 400 / 600 A GHG 412 8282 R0019
0 - 500 / 750 A GHG 412 8282 R0020
0 - 600 / 900 A GHG 412 8282 R0021
0 - 100% / 150% A GHG 412 8282 R0031
95
160
173 73
22
73
62
147
26
Interchangeable scales Measuring instrument
Example for Ordering Code
Dimension
AM 72 Measuring Instrument 413 84
Product of Manufacture: CN
F.77 EATON’S CROUSE-HINDS BUSINESS
Interchangeable AM72
Interchangeable scales for measuring instrument, CT connection n/1A for AM 45/AM 72
Scale Order unit Order No. AM45 Order No. AM72
0 - 1 / 1.5 A 10 GHG 410 1926 R0001 GHG 410 1928 R0001
0 - 2.5 /3.75 A 10 GHG 410 1926 R0002 GHG 410 1928 R0002
0 - 5 / 7.5 A 10 GHG 410 1926 R0003 GHG 410 1928 R0003
0 -10 / 15 A 10 GHG 410 1926 R0004 GHG 410 1928 R0004
0 - 15 / 22.5 A 10 GHG 410 1926 R0005 GHG 410 1928 R0005
0 - 20 / 30 A 10 GHG 410 1926 R0006 GHG 410 1928 R0006
0 - 25 / 37.5 A 10 GHG 410 1926 R0021 GHG 410 1928 R0021
0 - 30 / 45 A 10 GHG 410 1926 R0007 GHG 410 1928 R0007
0 - 40 / 60 A 10 GHG 410 1926 R0008 GHG 410 1928 R0008
0 - 50 / 75 A 10 GHG 410 1926 R0009 GHG 410 1928 R0009
0 - 60 / 90 A 10 GHG 410 1926 R0010 GHG 410 1928 R0010
0 - 75 / 112.5 A 10 GHG 410 1926 R0011 GHG 410 1928 R0011
0 - 100 / 150 A 10 GHG 410 1926 R0012 GHG 410 1928 R0012
0 - 150 / 225 A 10 GHG 410 1926 R0013 GHG 410 1928 R0013
0 - 200 / 300 A 10 GHG 410 1926 R0014 GHG 410 1928 R0014
0 - 250 / 375 A 10 GHG 410 1926 R0015 GHG 410 1928 R0015
0 - 300 / 450 A 10 GHG 410 1926 R0016 GHG 410 1928 R0016
0 - 400 / 600 A 10 GHG 410 1926 R0017 GHG 410 1928 R0017
0 - 500 / 750 A 10 GHG 410 1926 R0018 GHG 410 1928 R0018
0 - 600 / 900 A 10 GHG 410 1926 R0019 GHG 410 1928 R0019
0 - 100% / 150% 10 GHG 410 1926 R0020 GHG 410 1928 R0051
Special scales available on request
Example for Ordering Code
Interchangeable AM72
Product of Manufacture: CN
EATON’S CROUSE-HINDS BUSINESS F.78
Label
Labels for pushbutton
Inscription Order No. Inscription Order No.
0, I Start, Stop 001 0 002
I 003 II 004
D 005 STOP 006
START 007 NOT-AUS 008
LANGSAM 009 SCHNELL 010
EMERG.STOP 011 - 012
ARRET 014 MARCHE 015
AUF 016 AB 017
Neutral whtie 018 Neutral green 019
0, I, Arret, Marche 020 UP 024
DOWN 025 ZU 026
ON 027 OFF 028
+ 030 - 031
Neutral red 033 Neutral yellow 034
EIN 036 AUS 037
AUTO 039 HAND 050
SENKEN 051 HEBEN 052
LINKS 053 RECHTS 054
FAST 055 SLOW 056
RESET 057 OPEN 058
HALT 069 III 070
VOR 073 ZURUCK ¨ 074
FIRE ALARM 094 FORWARD 095
REVERSE 096 RUN 100
HIGH 101 LOW 102
LP 151 HQ 152
Technical data
Apparatus mounting plates for mounting on trellis work, walls and pipes, as well as for canopies
Material used for mounting plates Plastic reinforced with glass fibre
Material used for canopies Stainless steel V 4 A AISI 316 L
from 27 - 30 mm (not included in scope of delivery)
from 40 - 43 mm Outer diameter of pipes from 47 - 50 mm
from 59 - 62 mm
41 x 41 mm (e. g. Unistrut) Square profile U-shaped profile 60 x 40 mm
Wire diameter from 4.5 - 5 mm
Allocation of CEAG explosion-protected switchgear
to mounting plates
Apparatus Can be snapped on Can be screwed on
mounting plate
Size 1 Junction box eAZK 96 1 Installation plate GHG 273
Terminal box GHG 791 01 Control unit P411 GHG 411 81
Safety switch 10 A GHG 261
Size 2 Junction box eAZK 96 2 Control unit P412 GHG 411 82
Terminal box GHG 791 02 Control unit P413 GHG 411 82
Control switch Ex 29 GHG 292 Control unit Ex 43 2 GHG 432
Size 2A Terminal box 721 0 GHG 721 0
all size 2 apparatus
Size 3 horiz. Terminal box 721 0 GHG 721 1* Terminal box 721 1 GHG 721 1*
Terminal box 744 GHG 744
Control unit Ex 44 GHG 444
2 x Terminal box 745 GHG 745
2 x Control unit Ex 48 GHG 448
2 x Safety switch 40 A GHG 263 0050
2 x Safety switch 80 A GHG 264
Size 3 vert. Control switch Ex 29 GHG 293 Terminal box 744 GHG 744
Safety switch 20 A GHG 262 26 Control unit Ex 44 GHG 444
Safety switch 40 A GHG 263 23 Control unit Ex 43 4 GHG 434
Manual motor starter GHG 635
*only for wall or trelliswork mounting *only for pipe mounting
Apparatus Can be snapped on
mounting plate
Size 4 new Control unit P411 GHG 411 81*
Control unit P412 GHG 411 82*
Control unit P413 GHG 411 83*
Junction box eAZK 96 1 GHG 791 01*
Junction box eAZK 96 2 GHG 791 02*
Terminal box 791 01 GHG 791 01*
Terminal box 791 02 GHG 791 02*
Control switch Ex 29 P 292 GHG 292*
Safety switch 20 A 3-pole GHG 262*
Wall socket 16 A Zone 1 GHG 511
Wall socket 16 A Zone 2 GHG 516
Size 5 new 1 x Junction box eAZK 96 1 GHG 791 + 1 x safety switch 20 A 3-pole GHG 262*
2 x Safety switch 20 A 3-pole GHG 262*
2 x Junction box eAZK 96 1 GHG 791 01*
1 x Safety switch 20 A 6-pole GHG 262*
1 x Safety switch 40 A 3-pole GHG 263*
1 x Manual motor starter GHG 635*
1 x Control switch Ex 29 PA/WPA GHG 293*
1 x Control unit Ex 43 2fach GHG 432*
1 x Control unit Ex 43 4fach GHG 434*
1 x Wall socket 32 A Zone 1 GHG 512
1 x Wall socket 32 A Zone 2 GHG 517
LQ 157 ST OR.QUIT ¨ 162
SPERREN 163 ENTSPERREN 164
ENTRIEGELN 165 VERRIEGELN 166
Special labels are available on request.
Order Code
Label
6 065 0 I GHG 295 1000 R0002 Versalhem膠水44209
ST ST M27C1001 70C6 L 7B592 VS PHL 96 015
ASEMI PFS AC KBPC3510
EPCOS "S20 K250 需30個
S14K275 需20個"
"齒輪油溫傳感器|WZP270-172*100
齒輪軸承溫度傳感器|WZP270 L=60m
軸承溫度傳感器|WZTK-104B Φ6,L=15
軸承溫度傳感器|WZP-270 L=100
發(fā)電機(jī)油溫傳感器|WZTK-/Φ4，L=15 /-40 ～ 200
環(huán)境溫度傳感器(帶8m電纜）|WZP-002E(帶8m電纜）
機(jī)艙溫度傳感器(帶0.5m電纜）|WZP-002E(帶0.5m電纜）
七種各需3個"
西姆 HT23.5-400
西姆 SHD5W-1-EF3-1
JMW JMW8828S
SIBA、BUSSMANN NH00 gL/gG 63A 690V
PYROMATOIN、OMEGA PT100
AI-TEK AS-U30D-LT
MIDLAND-ACS SV102電磁閥
QI8010 紀(jì)揚(yáng)科技48 008-010-G10 103220 Gold 6MHz
QI8012 48 N/A N/A Longer Life Gold? 6MHz
QI8008 48 750-769-G1 103240 Stress Relieving Alloy? 6MHz
QI8014 48 N/A N/A Advanced Adhesion Alloy? 6MHz
QI8009 48 008-009-G10 103221 Silver 6MHz
FIL-TECH INFICON MAXTEK ELECTRODE FREQUENCY
QB104G 紀(jì)揚(yáng)科技55 B489-025-T 704996 Gold 5MHz
QB104GL 55 N/A N/A Longer Life Gold 5MHz
QB104A 55 N/A N/A Stress Relieving Alloy 5MHz
QB104S 55 BN845-104-T 704995 Silver 5MHz
QU4998 55 N/A 704998 Gold 6MHz
QU4998GL 55 N/A N/A Longer Life Gold 6MHz
QU4998A 55 N/A N/A Stress Relieving Alloy 6MHz
QU4997 55 N/A 704997 Silver 6MHz
FIL-TECH BALZERS UMICORE ELECTRODE FREQUENCY
3
FEEDTHROUGHS
QS3952 紀(jì)揚(yáng)科技52 1014048 103952 Gold 5MHz
QS3952GL 52 N/A N/A Longer Life Gold 5MHz
QS3954 52 N/A N/A Stress Relieving Alloy 5MHz
QS3950 52 1023968 103950 Silver 5MHz
QU5360 52 1005360 N/A Gold 5MHz
QU5360A 52 N/A N/A Stress Relieving Alloy 5MHz
FIL-TECH ULVAC SLOAN ELECTRODE FREQUENCY
QV7120 紀(jì)揚(yáng)科技150 PE105-02 1487-120 Gold 4.4MHz
QV7120S 150 PE105-01 N/A Silver 4.4MHz
QV7170-7 150 PE106-04 1487-170 Gold 5MHz
FIL-TECH PHELPS VEECO ELECTRODE FREQUENCY
QI8010F 紀(jì)揚(yáng)科技48 SN66NG Gold 6MHz
QI8012F 48 N/A Longer Life Gold 6MHZ
QI8008F 48 N/A Stress Relieving Alloy 6MHz
QI8009F 48 SN66NS Silver 6MHz
FIL-TECH INTELLEMETRICS ELECTRODE FREQUENCY
LIQUID PLATING CRYSTALS
1”Diameter 5MHz Polished Plano/Plano
FIL-TECH ELECTRODE SRS INFICON
QM1001 紀(jì)揚(yáng)科技30 each Cr/Au 0100RX1 紀(jì)揚(yáng)科技395/10 149273-1 紀(jì)揚(yáng)科技61 each
QM1003 35 Ti/Au 0100RX3 395/10 149257-1 51
QM1004 40 Ti/Pt 0100RX4 595/10 149274-1 67
QM1007 40 Ti/Ni
QM1008 30 Stress Relieving Alloy
QM1011 40 Ti/Mo
QM1012 40 Ti/Cu
QM1013 40 Ti/Zn
QM1015 40 Ti/SiO2
QM1017 40 Fe
QM1018 35 Cr/CrSQM-160 Multi-Film Rate/Thickness Monitor
紀(jì)揚(yáng)科技1,595
SQM-200 Dual Channel Rate/Thickness Monitor is the next generation
Rate/Thickness Monitor with 8 programmable digital inputs, 8
programmable digital outputs, and 4 analog outputs. The SQM-200 can
manage simple single sensor processes as well as more complicated
co-deposition and alloy processes with an independent mode allowing
it to function as two completely separate monitors. The SQM-200 has
temporal averaging for superior accuracy at low rates and spatial
averaging for superior accuracy in large chambers using planetary
fixtures. The SQM-200 has a shutter delay for precise control of film
quality with rate sampling capability and displays units in mass or
thickness with a Time/Power feature allowing films to complete even
with crystal failure. The SQM-200 is the perfect instrument for semiautomatic
deposition control and monitoring controller power in a
monitor at a low cost.
SQM-200 Dual Channel Rate/Thickness Monitor
5
TYPICAL SYSTEM
Sensor Head
QI3000 紀(jì)揚(yáng)科技400
Microdot
Cable
QI7044 紀(jì)揚(yáng)科技95
Feedthrough
QI2042 紀(jì)揚(yáng)科技350
6” BNC Cable
180-011 紀(jì)揚(yáng)科技35 Oscillator
180-010 紀(jì)揚(yáng)科技150
10’ BNC Cable
180-012 紀(jì)揚(yáng)科技44
TC Gauge
TC531 紀(jì)揚(yáng)科技55
Ion Gauge
G75K 紀(jì)揚(yáng)科技136 Rate/Thickness Monitor
See Options
Substrate
Source
ShutterMULTI POCKET EMITTERS
Socket hd. screw
#6-32 x 3/8” (4 places)
EB1254
Socket hd. screw
#6-32 x 1/2”(2 places)
EB1255
Socket hd. screw
#6-32 x 3/8”
EB1254
Washer flat #6 (2 places)
EB1201 紀(jì)揚(yáng)科技 .50 ea
Filament 7.5 turn
EB6871 紀(jì)揚(yáng)科技74/5
EB9351 紀(jì)揚(yáng)科技15/1
Cathode block left
EB9362 紀(jì)揚(yáng)科技110
Beam former
EB1822 紀(jì)揚(yáng)科技35
Locating insulator cross
EB6721 紀(jì)揚(yáng)科技5
Anode
EB0292 紀(jì)揚(yáng)科技70
Mounting bar
EB0322 紀(jì)揚(yáng)科技45
“L” Shaped insulator
EB8251 紀(jì)揚(yáng)科技30
Mounting bracket
EB0312 紀(jì)揚(yáng)科技70
Cathode block right
EB9372 紀(jì)揚(yáng)科技110
Insulator high voltage (2 places)
EB8781 紀(jì)揚(yáng)科技70/10
Filament clamp (2 places)
EB9382 紀(jì)揚(yáng)科技25 ea
Insulator shield (2 places)
EB0302 紀(jì)揚(yáng)科技15 ea
Filament bus bar pair
EB0343 紀(jì)揚(yáng)科技80
Emitter support bar
EB0332 紀(jì)揚(yáng)科技60
MULTI POCKET
EMITTER ASSEMBLY
TEMESCAL EB0284 紀(jì)揚(yáng)科技700
TELEMARK EB0150M 紀(jì)揚(yáng)科技700
Filament alignment gauge
EB4121 紀(jì)揚(yáng)科技10
Screws vented and moly coated 紀(jì)揚(yáng)科技3.00 ea
Screw kit EB1280 紀(jì)揚(yáng)科技40
All items stock
Telemark and Temescal parts
are interchangeable.
Telemark parts can be ordered using
Temescal part numbers.
Socket hd. screw
#6-32 x 1/4” (9 places)
EB1252
Filament 5.5 turns
EB5441 紀(jì)揚(yáng)科技74/5
Flanged insulator collar
(4-places)EB3131
紀(jì)揚(yáng)科技5 ea
6
Anode mounting bracket
EB8212 紀(jì)揚(yáng)科技75
Socket hd. screw
#6-32 x 3/8” (4 places)
EB1254
Anode
EB8192 紀(jì)揚(yáng)科技70
Socket hd. screw
#6-32 x 3/8” (2 places)
EB1254
Emitter mounting bar
EB8232 紀(jì)揚(yáng)科技70
Socket hd. screw
#6-32 x 3/16” (4 places)
EB1251
Cathode block left
EB8142 紀(jì)揚(yáng)科技110
Cathode block right
EB8152 紀(jì)揚(yáng)科技110
Beam former right
EB8182 紀(jì)揚(yáng)科技40
Beam former left
EB8172 紀(jì)揚(yáng)科技40
Filament
EB8310 紀(jì)揚(yáng)科技75/5
EB8132 紀(jì)揚(yáng)科技16/1
Filament clamp (2 places)
EB8162 紀(jì)揚(yáng)科技25 ea
Insulator high voltage (2 places)
EB8781 紀(jì)揚(yáng)科技70/10
EB4631 紀(jì)揚(yáng)科技 7 Each
Insulator shield (2 places)
EB0302 紀(jì)揚(yáng)科技15 ea
Filament bus bar right
EB8243R 紀(jì)揚(yáng)科技50
Filament bus bar left
EB8243L 紀(jì)揚(yáng)科技50
Washer flat #6 (2 places)
EB1200 紀(jì)揚(yáng)科技 .50 ea
Insulator (2 places)
EB3131 紀(jì)揚(yáng)科技5 ea
Emitter Mounting bracket
EB8222 紀(jì)揚(yáng)科技70
Cathode block Insulator
EB8251 紀(jì)揚(yáng)科技30
Socket hd. screw
#6-32 x 1/4” (4 places)
EB1252
Emitter support bar
EB8202 紀(jì)揚(yáng)科技80
Socket hd. screw
#6-32 x 3/8” (2 places)
EB1254
Socket hd. screw
#6-32 x 1/2”(2 places)
EB1255
HIGH PERFORMANCE
EMITTER ASSEMBLY
TEMESCAL EB8294 紀(jì)揚(yáng)科技800
All screws vented and moly coated 紀(jì)揚(yáng)科技3.00 ea
Screw kit EB1290 紀(jì)揚(yáng)科技45
Beam former spacing gauge EB8281 紀(jì)揚(yáng)科技10
Filament location gauge rod EB8271 10
Filament location gauge handle EB8261 10
All items stock
7
TEMESCAL, SATISLOH & TELEMARK
ELECTRON BEAM GUN PARTS
FILAMENTS INSULATORS EMITTERS SAVE
& Stock
Delivery
EMITTER ASSEMBLIES TEMESCAL TELEMARK Fil-Tech
High Performance 0916-8294-0 N/A EB8294 紀(jì)揚(yáng)科技800
Multi Pocket 0204-0284-0 273-0150-1 EB0284 700
Single Pocket 0304-1914-0 253-0150-1 EB1914 700
Emitter rebuilding service* N/A N/A EBREBLD 350
ELECTROMAGNETIC COIL
TEMESCAL Fil-Tech
Coil New 0312-6923-0 紀(jì)揚(yáng)科技1,555 EB6923 紀(jì)揚(yáng)科技1,400
INSULATORS TEMESCAL TEMESCAL TELEMARK Fil-Tech
Flanged/Collar 0303-3131-0 273-0006-1 EB3131 紀(jì)揚(yáng)科技 5
Locating/Cross 0303-6721-0 273-0005-1 EB6721 5
High Voltage 0602-8781-0 273-0010-1 EB8781 70/10
High Voltage 0418-4631-0 EB4631 7
Cathode Block ”L” Shaped 0916-8251-0 273-0008-1 EB8251 30
Sloan Insulator 126-116 EB6116 17
FILAMENTS Fil-Tech
TEMESCAL SuperSource? 0317-6871-0 EB6871 紀(jì)揚(yáng)科技 74
SuperSource 0303-9351-0 EB9351 15 /1
SuperSource 0515-5441-0 EB5441 74
High Performance? 0916-8310-0 EB8310 75
High Performance 0916-8132-0 EB8132 16/1
TELEMARK Multi Pocket 273-0001-1 EB0001 74
Multi pocket 273-0002-1 EB0002 74
THERMIONICS Multi Pocket A112153 EB6871 74
SATISLOH SuperSource A7500823P-122M EB6871 74
SuperSource A7500823P-005M EB6871-1 80
S Type A7500336J-003M EB8483-5 290/20
SLOAN 270 Gun 126-710 EB7910 150
LEYBOLD Hooked Ends 10-094-226 EB4226 180 /10
S Type 84830-005 EB8483-5 290 /20
JEOL Half moon 812180313 EB0313 65/5
All filaments 5 per box except otherwise indicated.
*Includes glass beading and chemically cleaning all metal parts, replacing filament, screws (all vented), insulators, and reassembling. Metal parts not included.
MULTI POCKET EMITTER PARTS
TEMESCAL TELEMARK Fil-Tech
Anode 0204-0292-0 273-0003-1 EB0292 紀(jì)揚(yáng)科技 70
Beam Former 0415-1822-0 273-0004-2 EB1822 35
Beam Former, Tantalum 0303-9392-0 N/A EB9392 50
Cathode Block, Left 0303-9362-0 273-0031-1 EB9362 110
Cathode Block, Right 0303-9372-0 273-0032-1 EB9372 110
Emitter Support Bar 0204-0332-0 273-0018-1 EB0332 60
Filament Clamp 0303-9382-0 273-0033-1 EB9382 25
Filament Bus Bar Set 0204-0343-0 273-0035/0036 EB0343 80
Insulator Shield 0204-0302-0 273-0011-1 EB0302 15
Mounting Bar 0204-0322-0 273-0017-1 EB0322 45
Mounting Bracket 0204-0312-0 273-0019-1 EB0312 70
Seal, Quad Ring 2108-0215-0 N/A EB0215 2
Seal, RL Gasket 0020-4811-2 N/A EB4811 3
HIGH PERFORMANCE EMITTER PARTS
TEMESCAL Fil-TechREMARKS TEMESCAL TELEMARK FIL-TECH
7CC 0627-6172-1 271-7007-1 EC0007-1 紀(jì)揚(yáng)科技40
15CC 0627-6172-3 271-7015-1 EC0015-1 50
25CC 4 Pocket 0627-6172-5 271-7025-1 EC4025-1 60
25CC 6 Pocket N/A 271-7025-2 EC6025-1 65
30CC W/Web N/A 271-7030-1 ECW030-1 75
30CC W/O Web N/A 271-7030-2 EC0030-1 75
40CC 0627-6172-7 271-7040-1 EC0040-1 80
TUNGSTEN
SIZE REMARKS TEMESCAL TELEMARK FIL-TECH
7CC 0627-6152-1 N/A EC0007-2 紀(jì)揚(yáng)科技375
15CC 0627-6152-3 N/A EC0015-2 400
25CC 4 Pocket 0627-6152-5 N/A EC4025-2 450
25CC 6 Pocket N/A N/A EC6025-2 460
30CC W/Web N/A N/A ECW030-2 475
30CC W/O Web N/A N/A EC0030-2 475
40CC 0627-6152-7 N/A EC0040-2 600
MOLYBDENUM
SIZE REMARKS TEMESCAL TELEMARK FIL-TECH
7CC 0627-6162-1 271-7007-3 EC0007-3 紀(jì)揚(yáng)科技175
15CC 0627-6162-3 271-7015-3 EC0015-3 230
25CC 4 Pocket 0627-6162-5 271-7025-3 EC4025-3 250
25CC 6 Pocket N/A 271-7025-4 EC6025-3 275
30CC W/Web N/A 271-7030-3 ECW030-3 315
30CC W/O Web N/A 271-7030-4 EC0030-3 315
40CC 0627-6162-7 271-7040-3 EC0040-3 330
CRUCIBLE
LINERS
SAVE TO Graphite Tungsten Molybdenum
40%
SPECIFICATIONS
Purity 99.99% Melting point 17130C
Form Granular Refractive index n/d 1.46 @ 500 nm
ORDERING INFORMATION
PART NO. GRANULAR SIZE (mm) PRICE
EM0024-5 2-4 500g 紀(jì)揚(yáng)科技100
SILICON DIOXIDE
High purity SiO2 specifically designed for electron beam evaporation
9
ION SOURCE PARTS
VEECO MARK I & MARK II,
ION TECH & SATISLOH
FILAMENTS
VEECO SATISLOH FIL-TECH
MARK I A30274 紀(jì)揚(yáng)科技7.00 A7500800Q-131M IS30274 紀(jì)揚(yáng)科技6
MARK II A16962 5.80 A7500800Q-101M IS16962 5
VEECO/ION TECH FIL-TECH
3&5cm Cathode 0503-107 IS3107 紀(jì)揚(yáng)科技6
3cm Neutralizer 0503-063 IS3063 6
INSULATORS
VEECO SATISLOH FIL-TECH
MARK I
B18005-1 Graphite 紀(jì)揚(yáng)科技 343 A7500800Q-134M IS18005G 紀(jì)揚(yáng)科技100
B18005-3 Stainless 75 A7500800Q-135M IS18005S 70
B18005-5 Titanium N/A IS18005T 100
MARK II
B16931-1 Graphite 紀(jì)揚(yáng)科技554 A7500800Q-174M IS16931G 紀(jì)揚(yáng)科技240
B16931-2 Stainless 79 A7500800Q-154M IS16931S 65
B16931-5 Titanium 209 A7500800Q-202M IS16931T 100
Call 800-743-1743 For Complete Listing Of MARK I & II Parts.
SAVE
TO
25%
ANODES
VEECO SATISLOH FIL-TECH
MARK I
B18003-1 Graphite 紀(jì)揚(yáng)科技74 A7500800Q-132M IS18003G 紀(jì)揚(yáng)科技60
B18003-2 Stainless 55 A7500800Q-133M IS18003S 50
MARK II
B16933-1 Graphite 紀(jì)揚(yáng)科技196 A7500800Q-175M IS16933G 紀(jì)揚(yáng)科技150
B16933-2 Stainless 75 A7500800Q-166M IS16933S 85
GAS DISTRIBUTORS
VEECO FIL-TECH
MARK II Cathode Tip
B17968/SP 紀(jì)揚(yáng)科技305 IS17968 紀(jì)揚(yáng)科技300
MARK II Keeper
A17973 紀(jì)揚(yáng)科技151 IS17973 紀(jì)揚(yáng)科技70
VEECO SATISLOH FIL-TECH
MARK I 1451001 紀(jì)揚(yáng)科技 7.50 A7500800Q-136M IS1001 紀(jì)揚(yáng)科技 5
MARK I & II 10-32M A7500800Q-167M IS1032 10
10-32F 10.00 IS1032F 10
6-32M N/A IS0632M 7
6-MS 8.50 IS06MS 7
1/4-20M 15.00 IS2520M 12
1/4-20F 15.00 IS2520F 12
VEECO/ION TECH 3 & 5cm FIL-TECH
0500-035 Male 紀(jì)揚(yáng)科技7.35 IS0035 紀(jì)揚(yáng)科技6
0500-036 Female 9.80 IS0036 7
0500-037 Male 8.50 IS0037 7
Fil-Tech
Fil-Tech
CRUCIBLES
TEMESCAL 4x15cc Pockets 0715-8444-0 紀(jì)揚(yáng)科技1,540 EB8444 紀(jì)揚(yáng)科技1,450
6x15cc Pockets 0715-8504-0 1,965 EB8504 1,750
4x25cc Pockets 0715-8454-0 1,540 EB8454 1,450
TELEMARK 6x15cc Pockets 271-0255-3 紀(jì)揚(yáng)科技2,000 EB0255-3 紀(jì)揚(yáng)科技1,750
4x25cc Pockets 271-0220-3 1,500 EB0220-3 1,450
6x25cc Pockets 271-0257-3 2,000 EB0257-3 1,750
All high water flow
CRUCIBLE COVERS
TEMESCAL 4 Pockets 0715-8143-0 紀(jì)揚(yáng)科技640 EB8143 紀(jì)揚(yáng)科技600
6 Pockets 0715-8153-0 745 EB8153 650
TELEMARK 4 Pockets 271-0073-1 EB0073 紀(jì)揚(yáng)科技475
6 Pockets 271-0074-1 EB0074 475
All Crucibles and Covers are OFHC
Aluminum Oxide Boron Nitride Copper Intermetallic Vitreous Carbon
And Custom Liners Available. Call 800-743-1743 or email paula@filtech.com.
Contact us for a complete list of Mark I and Mark II
replacement parts.
Call 800-743-1743 or email paula@filtech.com.
MARK II DESCRIPTION FIL-TECH PRICE
MARK II PARTS
B16923 Pole Piece, Outer IS16923 紀(jì)揚(yáng)科技192
B16927 Alnico-5 Magnet IS16927 65
B16928 Support Plate IS16928 344
B16929 Baffle IS16929 25
B16930 Spacer IS16930 27/3
B16932 Support, Back Anode IS16932 176
B16934 Support, Front Anode IS16934 189
B16935 Tie Rod, Short IS16935 36/2
B16936 Tie Rod, Long IS16936 36/2
B16937 Cathode Connection IS16937 100/2
B16938 Anode Connection IS16938 18
B16939 Support, Cathode IS16939 116/2
B16940 Knob, Hold Down IS16940 48/2
B16944 Retainer, Cable IS16944 100/3
B16946 Cover, Empty Socket IS16946 67
B16947 Work Station IS16947 96
B29958 Pin, Alignment IS29958 40/2
B29959 Screw, Hold Down IS29959 69/2
B29960 Socket IS29960 284
B29961 Plug IS29961 376
11
IONIZATION
GAUGE TUBES
IONIZATION
GAUGE TUBES
BY TYPE
IRIDIUM FILAMENT
Thoria coated iridium filament assures longer life.
FT PART NO. DESCRIPTION COMPETITION FIL-TECH
G75P 3/4” Pyrex MKS 紀(jì)揚(yáng)科技137 紀(jì)揚(yáng)科技126
G75K 3/4” Kovar MKS 155 136
G100P 1” Pyrex Agilent 171 135
G100K 1” Kovar Agilent 191 137
TWIN TUNGSTEN FILAMENTS
External switching of tungsten filaments without disturbing vacuum.
FT PART NO. DESCRIPTION COMPETITION FIL-TECH
G75PT 3/4” Pyrex MKS 紀(jì)揚(yáng)科技126 紀(jì)揚(yáng)科技124
G75KT 3/4” Kovar MKS 143 132
G100PT 1” Pyrex Agilent 146 126
G100KT 1” Kovar Agilent 172 132
PLATINUM COATED
Platinum coating minimizes electrostatic charge.
FT PART NO. DESCRIPTION COMPETITION FIL-TECH
G75PC 3/4” Pyrex Agilent 紀(jì)揚(yáng)科技237 紀(jì)揚(yáng)科技148
G75KC 3/4” Kovar Agilent 258 156
G100PC 1” Pyrex Agilent 237 146
G100KC 1” Kovar Agilent 258 156
FLANGED
Kovar tube mounted on 2 3/4” rotatable ultra high vacuum flange.
FT PART NO. DESCRIPTION FIL-TECH
G75KF 3/4” Iridium Flanged 紀(jì)揚(yáng)科技180
G100KF 1” Iridium Flanged 180
BROAD RANGE PLATINUM COATED
Operating pressure 4(10-10) to 5(10-2)torr.
FT PART NO. DESCRIPTION FIL-TECH
G8136P/1 1” Pyrex 紀(jì)揚(yáng)科技160
G8136K/1 1” Kovar 175
G8136F 2 3/4” Flange 200
G8136KF40 NW40 Flanged 215
TRIODES ULVAC
In-line tube X-ray limit 1 (10-7)torr.
FT PART NO. ULVAC PART NO. FIL-TECH
GT18T WIT-18 Tungsten 紀(jì)揚(yáng)科技 90
GT18IR WIT-18IR Iridium 110
SAVE
TO
40% All Fil-Tech ionization gauge tubes are identical or
functionally equivalent to the competitive tubes listed.
They are all manufactured by two companies and privately
labeled. See comparative prices for savings.
CROSS REFERENCE
AMAT/VSEA ION IMPLANTATION FIL-TECH
5300019 紀(jì)揚(yáng)科技245 1” Pyrex G100PT 紀(jì)揚(yáng)科技126
K7360301 146 1” Pyrex G100PT 126
4053050 1” Kovar, 2 3/4” Flange G100KTF 160
F2518001 80 TC Tube TC004V 50
AXCELIS ION IMPLANTATION FIL-TECH
3300002 紀(jì)揚(yáng)科技126 3/4” Pyrex G75PT 紀(jì)揚(yáng)科技124
3300008 83 TC Tube TC004V 50
AMAT/APPLIED ION IMPLANTATION FIL-TECH
3310-90003 1” Pyrex G100PT 紀(jì)揚(yáng)科技126
3310-01014 1” Kovar Coated G100KC 156
3310-00236 TC Tube TC6M 55
3310-01012 TC Tube TC531 55
3310-01071 TC Tube TC6MVCR 120
3310-01074 TC Tube TC531VCR 110
NOVELLUS SPUTTERING FIL-TECH
27-229-700-00 紀(jì)揚(yáng)科技352 1” Pyrex G8136P/1 紀(jì)揚(yáng)科技160
60-00005-00 TC Tube TC6M 55
60-00180-00 TC Tube TC6MVCR 120
AGILENT BROAD RANGE FIL-TECH
K2500301 紀(jì)揚(yáng)科技220 1” Pyrex G8136P/1 紀(jì)揚(yáng)科技160
K2500302 240 1” Kovar G8136K/1 175
K2500311 291 NW40 Flanged G8136KF40 215
MKS FIL-TECH
274002 紀(jì)揚(yáng)科技137 G75P 紀(jì)揚(yáng)科技126
274003 155 G75K 136
274005 148 G100P 135
274006 165 G100K 137
274007 237 G75KF 180
274008 237 G100KF 180
274012 126 G75PT 124
274013 143 G75KT 132
274015 137 G100PT 126
274016 155 G100KT 132
AGILENT FIL-TECH
K2466301 紀(jì)揚(yáng)科技237 G100PC 紀(jì)揚(yáng)科技146
K2466302 258 G100KC 156
K2466303 304 G100KCF 205
K2471301 171 G100P 135
K2471302 191 G1OOK 137
K2471303 253 G100KF 180
K7360301 146 G100PT 126
K7360303 146 G75PT 124
MRC FIL-TECH
4050300 .709” Pyrex G71PT 紀(jì)揚(yáng)科技136
10
THERMOCOUPLE
GAUGE TUBES
Competition Fil-Tech
Axcelis 3300008 紀(jì)揚(yáng)科技 83 TC004V 紀(jì)揚(yáng)科技 50
Axcelis 33001330 204 TC004KF16 120
Axcelis 3300044 127 TC3344 100
AMAT F2518001 80 TC004V 50
AMAT 3310-00236 N/A TC6M 55
AMAT 3310-01012 N/A TC531 55
AMAT 3310-01071 N/A TC6MVCR 120
AMAT 3310-01074 N/A TC531VCR 110
Temescal 6920-4263-0 125 TC6M 55
Novellus 60-00005-00 N/A TC6M 55
Novellus 60-00180-00 N/A TC6MKF25 140
Competition Fil-Tech
Agilent F0472301 紀(jì)揚(yáng)科技 72 TC531 紀(jì)揚(yáng)科技 55
Agilent F0472310 N/A TC531VCR 110
Hastings DV-6M 70 TC6M 55
Hastings DV-6-VCR 146 TC6MVCR 120
Hastings DV-6-KF16 185 TC6MKF16 120
Hastings DV-6-KF25 185 TC6MKF25 140
CVC GTC-004 175 TC004 50
MKS 270006 113 TC6M 55
CTI/Brooks 8112105 270 TC6MVCR 120
Thermionics 6343-004M N/A TC004V 50
SEMICONDUCTOR APPLICATIONS VACUUM APPLICATIONS
Panel Mount Single Station
TC101 TC531 Tube 紀(jì)揚(yáng)科技300
TC201 TC6M Tube 300
Cabinet Mount Single Station
TC101C TC531 Tube 紀(jì)揚(yáng)科技370
TC201C TC6M Tube 370
All units come with required tubes and cables and are 120 volts.
Call for pricing on 240 volts units. Panel Mount Single Analog
THERMOCOUPLE CONTROLLERS
SAVE
TO
50%
Plug Compatible No Process Changes Required Drop-In Replacement
Guaranteed Identical Performance Savings to 20%
SAVE
20%
Fitting MKS Convection Gauge Fil-Tech MKS Mini Convection Gauge Fil-Tech Super Bee Fil-Tech
1/8” NPT 275071 CVG101GA 紀(jì)揚(yáng)科技105 275800 CVM211GAA 紀(jì)揚(yáng)科技 275 CVM201GAA 紀(jì)揚(yáng)科技408
NW16KF 275203* CVG101GB 126 275806 CVM211GBA 295 CVM201GBA 428
NW25KF 275196 CVG101GC 137 275807 CVM211GCA 305 CVM201GCA 438
1/4” VCR 275185** CVG101GG 137 275801 CVM211GGA 305 CVM201GGA 438
CONVECTION GAUGES
Directly Replace Convectrons?
* 275203: Axcelis 3300317
** 275185: AMAT 275262
Novellus/Lam 77-1090453-001
Novellus 60-00055-00
Trademarks
Fil-Tech, Inc.?
Advanced Adhesion Alloy?
Longer Life Gold?
Quality Crystals?
Stress Relieving Alloy?
Other Trademark Owners
Agilent Technologies, Inc.
Alcatel Vacuum Technology
Applied Materials, Inc.
Axcelis Technologies, Inc.
The Chemours Company
MKS Instruments
Dow Corning Corp.
Brooks Automation, Inc.
Teledyne Technologies, Inc.
Ferrotec Corp.
Inficon
Veeco Instruments, Inc.
The Chemours Company
Intellevation Ltd.
Lam Research Corporation
Oerlicon Leybold Vacuum
Inficon
MKS Instruments
Novellus Systems, Inc.
Phelps Electronic, Inc.
Arch Technology Holding, LLC
Satisloh GmbH
Veeco Instruments, Inc.
Ferrotec Corp.
Telemark
Ferrotec Corp.
TLI Enterprises, Inc.
The Torr Lube Company, LLC
ULVAC Technologies, Inc.
Umicore
OC Oerlikon Corp., AG
Veeco Instruments, Inc.
Microsoft, Inc.
Agilent?
Alcatel?
AMAT?
Axcelis?
Chemours?
Convectron?
Dow Corning?
CTI/Brooks?
Hastings?
High Performance?
Inficon?
Ion Tech?
Krytox?
Intellemetrics?
Lam?
Leybold?
Martek?
MKS?
Novellus?
Phelps?
Santovac?
Satisloh?
Sloan?
SuperSource?
Telemark?
Temescal?
Thermionics?
TorrLube?
ULVAC?
Umicore?
Unaxis?
Veeco?
Windows?
DOW CORNING? FIL-TECH?
FIL-TECH SELLS SILICONES
DC702
1 Gallon 紀(jì)揚(yáng)科技 650
5 Gallon 3,500
DC704
500 cc 紀(jì)揚(yáng)科技 120
1 Gallon 795
5 Gallon 3,750
DC705
500 cc 紀(jì)揚(yáng)科技 300
1 Gallon 1,500
5 Gallon 7,800
FT702
1 Gallon 紀(jì)揚(yáng)科技 380
5 Gallon 1,700
FT704
500 cc 紀(jì)揚(yáng)科技 80
1 Gallon 480
5 Gallon 2,200
FT705
500 cc 紀(jì)揚(yáng)科技 125
1 Gallon 750
5 Gallon 3,600
Phenylmethylsiloxane is an economical general
purpose silicone fluid for pumping large gas loads.
Vacuum 10-5 to 10-7 torr.
Tetramethyltetraphenyltrisiloxane is a single
component fluid extensively used for applications
requiring rapid pump down of large gas loads.
For performance and economics, your best choice.
Vacuum 10-5 to 10-8 torr.
Pentaphenyltrimethyltrisiloxane is a single component
fluid for ultra high and ultra clean vacuums.
For lowest ultimate pressure, your best choice.
Vacuum 10-5 to 10-10 torr.
All Fil-Tech’s fluids are the functional equivalent to Dow Corning’s DC702, DC704, and DC705, respectively. They can be mixed and/or reprocessed together
in any portion with their respective counterpart. Fil-Tech sells silicones.
Reprocessing 702 紀(jì)揚(yáng)科技 150 / Gallon
704 150 / Gallon
705 160 / Gallon
Call Fil-Tech at 800-743-1743 for a
free 5 gallon DOT approved pail to
collect your used fluid.
SAVE
TO
25%
SILICONES
SANTOVAC? 5 will provide vacuums in the 10-10 torr range with
exceptionally low vapor pressure and backstreaming. It is excellent for
applications that must be free of silicones or those requiring ultra high,
clean vacuums.
SANTOVAC 5
Polyphenyl Ether
Diffusion Pump Fluid
SANTOVAC 5
SANTOVAC 5
SANT5-006 65 cc 紀(jì)揚(yáng)科技175 SANT5-05 500 cc 紀(jì)揚(yáng)科技 875
SANT5-01 100 cc 230 SANT5-1 1 Gallon 6,400
NO LONGER
AVAILABLE
FIL-TECH FLUID vs TORRLUBE
12 13
NEW
CL7 10-7ccHe/sec 紀(jì)揚(yáng)科技500
CL8 10-8ccHe/sec 500
RECALIBRATION
Certification 紀(jì)揚(yáng)科技350
CALIBRATED HELIUM LEAKS
NIST Traceable Certification
SAVE
TO
20%
NUDE GAUGES & FILAMENTS
AGILENT MKS
Flange 2 3/4” Header Ceramic to Metal Seal Degas E-Beam Only
AGILENT MKS DESCRIPTION FIL-TECH
9715008 紀(jì)揚(yáng)科技521 274022 紀(jì)揚(yáng)科技472 Tungsten Dual GU21T 紀(jì)揚(yáng)科技350
9715007 571 274023 512 Iridium Dual GU21IR 375
274043 540 Iridium Single With Pin Guard GU43IR 440
UHV GAUGES
REPLACEMENT FILAMENTS
AGILENT DESCRIPTION FIL-TECH
9710018 紀(jì)揚(yáng)科技 93 Twin Tungsten GF18 紀(jì)揚(yáng)科技40
9710028 181 Twin Iridium GF28 60
One filament p er box
MKS DESCRIPTION FIL-TECH
274024 紀(jì)揚(yáng)科技160 Twin Tungsten GF24 紀(jì)揚(yáng)科技60
274025 182 Twin Tungsten GF25 70
274029 160 Single Iridium GF29 70
One filament per box
BAYARD ALPERT GAUGES
FIL-TECH DESCRIPTION PRICE
GB22T Tungsten Dual 紀(jì)揚(yáng)科技350
GB22IR Iridium Single 375
Flange 2 3/4” Header Ceramic to Metal Seal Degas E-Beam or I2R
ALCATEL FIL-TECH
Filament 053146 LD10 紀(jì)揚(yáng)科技150
Collector Single 083485 LD11 30
Collector Double 101127 LD12 32
LEAK DETECTOR FILAMENTS
AGILENT FILAMENT NEW REPAIR EXCHANGE
Ion Source 82850301 Tungsten LD7 紀(jì)揚(yáng)科技 100 LD7RE 紀(jì)揚(yáng)科技 50
Ion Source 82850302 Iridium LD8 165 LD8RE 100
Ion Source VSFL Iridium N/A VSFLRE 150
Save Over 20%
Fil-Tech Fluid dramatically increases bearing life in vacuum
and semiconductor processes by reducing friction. It has exceptional
lubricating properties for sliding and rotating applications
to 10-8 torr. Fil-Tech Fluid functions in a wide temperature
range (-200C to 2600C) and is chemically inert in the presence
of most semiconductor gasses such as fluorine at 2000C and
trifluoride at 500C.
FT PART NO. SIZE TORRLUBE? FIL-TECH FLUID TM
FTF001 1 cc Syringe 紀(jì)揚(yáng)科技 112 紀(jì)揚(yáng)科技 90
FTF003 3 cc Syringe N/A 250
FTF100 2-50 cc Bottles 1,280 1,000
Fil-Tech’s LD10’s are drop in replacements for the OEM
part. Our filament is welded into the slotted posts for
greater reliability and longer life.
15
Molecularly distilled hydrocarbon fluid for non-corrosive applications.
FT19 works well for all mechanical pumps.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: 1 x 10-5 torr 1 Gallon 紀(jì)揚(yáng)科技 25
Viscosity @ 40O C: 54 cst (251 SUS) 5 Gallon 90
Viscosity @100O C: 8 cst (52.7 SUS) 55 Gallon 790
14
Molecularly distilled hydrocarbon for large rotary piston pumps and roots blowers in non-corrosive
applications requiring highest viscosity fluids.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: 4 x 10-4 torr 1 Gallon 紀(jì)揚(yáng)科技 35
Viscosity @ 40O C: 205 cst (950 SUS) 5 Gallon 140
Viscosity @100O C: 18 cst (85 SUS) 55 Gallon 965
Molecularly distilled hydrocarbon fluid for rotary piston pump in non-corrosive applications.
It has the high viscosity required for the proper lubrication of piston pumps
.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: 1 x 10-4 torr 1 Gallon 紀(jì)揚(yáng)科技 25
Viscosity @ 40O C: 90 cst (418 SUS) 5 Gallon 110
Viscosity @100O C: 10 cst (58.8 SUS) 55 Gallon 890
Doubly distilled hydrocarbon fluid for corrosive or reactive applications. It is ideal for direct drive
and belt driven mechanical pumps. FT20 is also suitable for diffusion pump applications.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: 1 x 10-6 torr 1 Gallon 紀(jì)揚(yáng)科技 50
Viscosity @ 40O C: 58 cst (269 SUS) 5 Gallon 200
Viscosity @100O C: 8.5 cst (54.1 SUS) 55 Gallon 1,600
Molecularly distilled hydrocarbon fluid containing no additives. Specifically recommended for mechanical
pumps exposed to reactive or corrosive gasses. FTTW is the longest lasting hydrocarbon fluid.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: <1 x 10-6 torr 1 Gallon 紀(jì)揚(yáng)科技 50
Viscosity @ 40O C: 56 cst (260 SUS) 5 Gallon 200
Viscosity @100O C: 9 cst (55.4 SUS) 55 Gallon 1,600
TECHNICAL WHITE
Molecularly distilled hydrocarbon for large rotary piston pumps and roots blowers in non-corrosive
applications requiring higher viscosity fluids.
SPECIFICATIONS SIZES AVAILABLE PRICE
Vapor Pressure @ 25O C: 4 x 10-4 torr 1 Gallon 紀(jì)揚(yáng)科技 30
Viscosity @ 40O C: 175 cst (800 SUS) 5 Gallon 130
Viscosity @100O C: 20 cst (97 SUS) 55 Gallon 840
MECHANICAL PUMP FLUIDS KRYTOX VACUUM PUMP FLUIDS
KRYTOX? FLUID
Chemours Krytox fluids are totally perfluorinated
polyether fluids (PFPE) that are suitable for the harsh
environments associated with semiconductor
processes. The fluids are chemically inert, thermally
stable, oxygen resistant and nonflammable. They are
available with controlled low vapor pressures and
viscosities. Applications include plasma etching,
LPCVP and 100% oxygen service.
REMANUFACTURING SERVICE
Fil-Tech’s remanufacturing service restores your
contaminated KRYTOX or other PFPE fluids to
their original properties at high recovery yields. Your
PFPE fluid can also be extracted from used filters
and the used filters will then be disposed of in an
environmentally safe manner. The cost is a fraction
of the price of new fluid. Call for pricing.
Call Fil-Tech at
800-743-1743 for a free DOT
approved pail to collect your
used fluid for remanufacture.
FLUID PRICE
1506 紀(jì)揚(yáng)科技290/kg
1514 290/kg
1525 290/kg
1514XP 315/kg
1525XP 315/kg
XP Rust preventative fluid
Contact Fil-Tech for quantity discounts.
KRYTOX VACUUM GREASES
Chemours has a series of Krytox (PFPE) vacuum greases
suitable for various applications. Your viscosity, temperature and
vapor pressure requirements will determine your choice of grease.
All Krytox greases are inert and suitable for applications
requiring high temperature stability and low vapor pressure.
They show excellent resistance to the aggressive environments
inherent in the semiconductor industry. Krytox greases are
oxygen compatible and hydrocarbon free.
PFPE SOLVENT
KXSolv-1 紀(jì)揚(yáng)科技475/gallon
PRICE
Electronic Grade EG Greases 2 oz 8 oz Kg
EG2000 紀(jì)揚(yáng)科技94 紀(jì)揚(yáng)科技335 紀(jì)揚(yáng)科技1,340
EG3000 94 335 1,340
Aerospace 240 Greases (MILSPEC) 2 oz 8 oz Kg
240AC 紀(jì)揚(yáng)科技190 紀(jì)揚(yáng)科技660 紀(jì)揚(yáng)科技2,350
240AD 190 660 2,350
Low Vapor Pressure 2 oz 8 oz Kg
LVP 紀(jì)揚(yáng)科技94 紀(jì)揚(yáng)科技345 紀(jì)揚(yáng)科技1,350
General Purpose Greases 2 oz 8 oz Kg
GPL202 紀(jì)揚(yáng)科技40 紀(jì)揚(yáng)科技130 紀(jì)揚(yáng)科技460
GPL205 40 130 460
GPL206 40 130 460
GPL207 40 130 460
GPL224 40 130 460
GPL226 40 130 460
SPECIFICATIONS
Temperature Range Viscosity at 40°C Vapor Pressure at 40°C
-34°/288°C 240 cSt 2 x 10-8 torr
-29°/316°C 440 cSt 6 x 10-9 torr
Temperature Range Viscosity at 40°C Vapor Pressure at 40°C
-34°/288°C 270 cSt 8 x 10-8 torr
-29°/316°C 500 cSt 6 x 10-9 torr
Temperature Range Viscosity at 40°C Vapor Pressure at 40°C
15°/300°C 740 cSt 1 x 10-13 torr
Temperature Range Viscosity at 40°C Grade
-63°/132°C 15 cSt Standard Grade
-36°/204°C 160 cSt Standard Grade
-36°/260°C 243 cSt Standard Grade
-30°/288°C 450 cSt Standard Grade
-51°/179°C 60 cSt Anti Corrosion
-36°/260°C 160 cSt Anti Corrosion
Anode 0916-8192-0 EB8192 紀(jì)揚(yáng)科技 70
Anode Mounting Bracket 0916-8212-0 EB8212 75
Beam Former, left 0916-8172-0 EB8172 40
Beam Former,Right 0916-8182-0 EB8182 40
Beam Former Spacing Gauge 0916-8281-0 EB8281 10
Cathode Block Insulator 0916-8251-0 EB8251 30
Cathode Block, Left 0916-8142-0 EB8142 110
Cathode Block, Right 0916-8152-0 EB8152 110
Emitter Mounting Bar 0916-8232-0 EB8232 70
Emitter Mounting Bracket 0916-8222-0 EB8222 70
Emitter Support Bar 0916-8202-0 EB8202 80
Filament Bus Bar, Left 0916-8243-1 EB8243L 50
Filament Bus Bar, Right 0916-8243-2 EB8243R 50
Filament Clamp 0916-8162-0 EB8162 25
Ion/TC Control
ORDERING INFORMATION
MONITOR/CONTROLLER OPTIONS
SQM?160 Rate/thickness monitor 紀(jì)揚(yáng)科技1,595
SQM-200 Rate/thickness monitor 1,730
SQM-220 Rate/thickness monitor/controller 1,900
COMPONENTS REQUIRED FOR COMPLETE TYPICAL SYSTEM
180-010 Remote analog oscillator 紀(jì)揚(yáng)科技150
180-011 6” BNC cable M/F 35
